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1 article(s) from Fox, Daniel

Nano-structuring, surface and bulk modification with a focused helium ion beam

Daniel Fox,
Yanhui Chen,
Colm C. Faulkner and
Hongzhou Zhang

Beilstein J. Nanotechnol. 2012, 3, 579–585, doi:10.3762/bjnano.3.67

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Figure 1: (a) SEM image of the silicon lamella (sample 1) after FIB preparation. (b) HAADF TEM image of the s...

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Figure 2: HRTEM (a) and diffraction (b) information from gallium finished region. HRTEM (c) and diffraction i...

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Figure 3: (a) HAADF image of the TiO₂ sample (sample 2) after FIB lift-out. (b) HAADF image of the sample aft...

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Figure 4: (a) SEM image of the silicon lamella (sample 3) after FIB lift-out and a 5 keV gallium ion polish. ...

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Figure 5: Thickness map of the modified region. The arrow indicates the area along which the integrated inten...

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Figure 6: (a) EELS spectra of an unmodified area of silicon (solid black line), the HIM fabricated wedge mark...

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Full Research Paper

Published 08 Aug 2012

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